Bildgebungsvorrichtung
Anmelder: SCREEN Holdings Co., Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP3214163
- Aktenzeichen
- EP16186593
- Anmeldetag
- 31. August 2016
- Veröffentlichung
- 8. Juni 2022
- Erteilung
- 8. Juni 2022
- Rechtsraum
- EP
- IPC
- C12M1/00C12M1/32C12M1/34G01N21/25G01N33/487G02B21/00G02B21/08// G01N21/64G02B21/36
Abstract
An illuminator includes a light source and an illumination optical system for causing light emitted from the light source to be incident on a sample surface where an imaging object is present. The illumination optical system has an optical axis coaxial with that of an imaging optical system. An image of the light source is formed between the illumination optical system and the imaging optical system. A holder arranges the sample surface between the light source image and the imaging optical system.
Anmelder
- Firma
- SCREEN Holdings Co., Ltd.
- Land
- 🇯🇵 Japan
Japanischer Technologiekonzern. SCREEN Holdings stellt Fertigungsanlagen für die Halbleiterindustrie her, insbesondere Wafer-Reinigungs- und Beschichtungssysteme, sowie Druck- und Bildverarbeitungstechnik.
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