Mems-Wandler in einem Phasenarray mit Ankopplung an einem Flexiblen Substrat mit Kohlenstoffnanoröhrchen für Konforme Ultraschallabtastung

Details

Veröffentlichungs-Nr.

EP3235780

Aktenzeichen

EP17167128

Anmeldetag

19. April 2017

Veröffentlichung

5. August 2020

Erteilung

5. August 2020

Rechtsraum

EP

IPC

B81C3/00B06B1/04G01N29/04G01N29/24G01N29/26B82Y15/00

Abstract

A plurality of micro-electro-mechanical system (MEMS) transducers in a phased array are coupled to a flexible substrate using carbon nanotubes (CNTs) for conformal ultrasound scanning. Each transducer comprises a cantilever, magnetic material deposited on the cantilever, and a solenoid positioned relative to the magnetic material. The carbon nanotubes are grown on the cantilever and mechanically couple the transducer to one side of the flexible substrate. The other side of the flexible substrate is applied to a surface of a part under inspection, and the transducers are electrically connected to a processer to cause movement of the cantilevers when the solenoids are energized by the processor. The movement of the cantilevers results in movement of the carbon nanotubes, which imparts a force to the flexible substrate that results in ultrasound waves, which permeate the part. Returns from the ultrasound waves are interpreted by the processor to generate images of the part.

Anmelder

Firma

The Boeing Company

Land

🇺🇸 USA

Fachgebiete