Verfahren zur Herstellung von Mikro-Rohren auf einem Substrat und daraus Hergestellte Struktur

Details

Veröffentlichungs-Nr.

EP3281910

Aktenzeichen

EP16183687

Anmeldetag

11. August 2016

Veröffentlichung

2. Oktober 2019

Erteilung

2. Oktober 2019

Rechtsraum

EP

IPC

B81C1/00

Abstract

A method for producing a structure comprising, on a main surface of a substrate, at least one elongated cavity having openings at opposing ends. The method comprises providing a substrate having a main surface. On the main surface, a first pair of features are formed that protrude perpendicularly from the main surface. The features have elongated sidewalls and a top surface, are parallel to one another, are separated by a gap having a width sl and a bottom area, and have a width wl and a height h1. A ratio of h1/w1 is in the range of 3 to 30 and wherein the separation gap sl is less than twice the height of h1. At least the main surface of the substrate and the first pair of features are brought in contact with a liquid, suitable for making a contact angle of less than 90° with the material of the elongated sidewalls and subsequently, the substrate is dried.

Anmelder

Firma

IMEC VZW

Land

🇧🇪 Belgien