Verringerung der Taubildung durch Vorbereitung der Probe für die Untersuchung

Details

Veröffentlichungs-Nr.

EP3351923

Aktenzeichen

EP18152594

Anmeldetag

19. Januar 2018

Veröffentlichung

4. Mai 2022

Erteilung

4. Mai 2022

Rechtsraum

EP

IPC

G01N1/28G01N1/40G01N1/42

Abstract

A lower-side structure (12) forms a specimen chamber (18) in which a specimen base is provided. An upper-side structure (14) forms a nozzle chamber (20) above the specimen chamber (18). The specimen chamber (18) and the nozzle chamber (20) are separated by a gate valve (16). In the nozzle chamber (20), at least a tip opening (36) of a nozzle (34) that ejects a specimen is present. A control device (74) maintains a relationship of gas pressures such that a gas pressure in the specimen chamber (18) is higher than a gas pressure in the nozzle chamber (20) when the lower-side structure (12) and the upper-side structure (14) are in communication with each other.

Anmelder

Firmen

JEOL Ltd.
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Jeol Ltd.
National Institute of Advanced Industrial Science and Technology

Land

🇯🇵 Japan

Fachgebiete