Hoch-Productives Beschichtungs-System
Anmelder: LAM Research Corporation 🇺🇸
Details
- Veröffentlichungs-Nr.
- EP3352205
- Aktenzeichen
- EP18151863
- Anmeldetag
- 16. Januar 2018
- Veröffentlichung
- 13. Oktober 2021
- Erteilung
- 13. Oktober 2021
- Rechtsraum
- EP
- IPC
- H01L21/67H01L21/677
Abstract
A mechanical indexer for a substrate processing tool includes first and second arms each having first and second end effectors. The first arm is configured to rotate on a first spindle to selectively position the first end effector of the first arm at a plurality of processing stations of the substrate processing tool and selectively position the second end effector of the first arm at the plurality of processing stations of the substrate processing tool. The second arm is configured to rotate on a second spindle to selectively position the first end effector of the second arm at the plurality of processing stations of the substrate processing tool and selectively position the second end effector of the second arm at the plurality of processing stations of the substrate processing tool. The first arm is configured to rotate independently of the second arm.
Anmelder
- Firma
- LAM Research Corporation
- Land
- 🇺🇸 USA
US-amerikanischer Hersteller von Fertigungsanlagen für die Halbleiterindustrie mit Sitz in Fremont, Kalifornien, spezialisiert auf Ätz- und Beschichtungssysteme (Deposition) für die Chipproduktion.
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