Grundwerkstoffverarbeitungsvorrichtung und Detektionsverfahren
Anmelder: SCREEN Holdings Co., Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP3378809
- Aktenzeichen
- EP18152953
- Anmeldetag
- 23. Januar 2018
- Veröffentlichung
- 19. Mai 2021
- Erteilung
- 19. Mai 2021
- Rechtsraum
- EP
- IPC
- B41J11/00B65H23/02B41J15/04B65H23/04B65H23/188G03G15/00H04N1/50
Abstract
A base material processing apparatus includes first and second edge sensors and a displacement amount calculation part. The first edge sensor acquires a first detection result (R1) by detecting the position of an edge of a base material in a width direction at a first detection position. The second edge sensor acquires a second detection result (R2) by detecting the position of the edge of the base material at a second detection position. The displacement amount calculation part calculates the amount of displacement in the position of the base material in the transport direction or the amount of difference in the transporting speed of the base material on the basis of the first and second detection results (R1, R2). Thus, the amount of displacement in the position or the amount of difference in the transporting speed can be detected without depending on images such as register marks.
Anmelder
- Firma
- SCREEN Holdings Co., Ltd.
- Land
- 🇯🇵 Japan
Japanischer Technologiekonzern. SCREEN Holdings stellt Fertigungsanlagen für die Halbleiterindustrie her, insbesondere Wafer-Reinigungs- und Beschichtungssysteme, sowie Druck- und Bildverarbeitungstechnik.
854 Patente in unserer Datenbank