Verkettete Suspension in einem Piezoelektrischen Kreisel
Anmelder: Murata Manufacturing Co., Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP3407015
- Aktenzeichen
- EP18173736
- Anmeldetag
- 23. Mai 2018
- Veröffentlichung
- 19. August 2020
- Erteilung
- 19. August 2020
- Rechtsraum
- EP
- IPC
- G01C19/5712
Abstract
The disclosure describes a microelectromechanical gyroscope comprising a substrate and at least one inertial mass suspended from an anchor points by a suspension structure configured to allow the first inertial mass to oscillate rotationally both in the device plane and out of the device plane. The suspension structure comprises a set of first suspenders coated with piezoelectric transducer structures configured drive or detect the oscillating motion of the suspended inertial mass in the device plane, and a set of second suspenders coated with piezoelectric transducer structures configured to drive or detect the oscillating motion of the suspended inertial mass out of the device plane. The set of first suspenders and set of second suspenders are concatenated in the suspension structure.
Anmelder
- Firma
- Murata Manufacturing Co., Ltd.
- Land
- 🇯🇵 Japan
Japanisches Elektronikunternehmen mit Sitz in Kyoto. Murata entwickelt und produziert elektronische Bauelemente wie Kondensatoren, Sensoren und Kommunikationsmodule für Elektronikgeräte.
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