Piezoelektrischer Rotations-Mems-Resonator

Details

Veröffentlichungs-Nr.

EP3407491

Aktenzeichen

EP18173725

Anmeldetag

23. Mai 2018

Veröffentlichung

6. Oktober 2021

Erteilung

6. Oktober 2021

Rechtsraum

EP

IPC

G01C19/5712H03H9/02H01L41/09

Abstract

This disclosure reveals a resonator where at least one suspended inertial mass is driven into rotational oscillation by a piezoelectric drive transducer, or where the rotational motion of at least one suspended inertial mass is sensed by a piezoelectric sense transducer. The disclosure is based on the idea of attaching suspenders to the inertial mass with at least one flexure, which allows the end of the suspender which is attached to the inertial mass to rotate in relation to the inertial mass at this attachment point when the inertial mass is in motion. The resonator may be employed in a resonator system, a clock oscillator or a gyroscope.

Anmelder

Firma

Murata Manufacturing Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete