Euv-Absorbierende Legierungen

Details

Veröffentlichungs-Nr.

EP3454119

Aktenzeichen

EP17190263

Anmeldetag

9. September 2017

Veröffentlichung

27. Dezember 2023

Erteilung

27. Dezember 2023

Rechtsraum

EP

IPC

G03F1/22G03F1/24G03F1/54C22C45/04C22C19/07C22C19/03C22C45/00C22C5/04C22C12/00C22C28/00

Abstract

In a first aspect, the present invention relates to an alloy comprising: i. one or more first elements selected within a single of - a first list consisting of Ag, Ni, Co and Fe, and - a second list consisting of Ru, Rh, Pd, Os, Ir, and Pt, ii. one or more second elements selected within a single of - the first list, if the one or more first elements were not selected within said first list, and - a third list consisting of Sb and Te, iii. optionally one or more third elements selected from the list consisting of B, N and P, and iv. optionally one or more fourth elements selected from the list consisting of W, Ta, Hf, Nb and Mo.

Anmelder

Firmen

IMEC vzw
Katholieke Universiteit Leuven

Land

🇧🇪 Belgien

Fachgebiete