Vorrichtung zur Herstellung einer Maske und Verfahren zur Herstellung einer Maske

Details

Veröffentlichungs-Nr.

EP3482868

Aktenzeichen

EP18206324

Anmeldetag

14. November 2018

Veröffentlichung

7. August 2019

Rechtsraum

EP

IPC

B23K26/0622B23K26/064B23K26/082B23K26/364B05C21/00C23C14/04G03F1/80C23C16/04H01L27/32H01L51/00// B23K26/06H01L51/56B23K103/02

Abstract

An apparatus (2000) for manufacturing a mask (MS) is provided. The apparatus includes a stage (700) on which a pre-mask is disposed, and a laser irradiation device (600) including a laser generation member (610), an optical system (620) for controlling a shape of a laser beam, and a scanner (630) for adjusting a path of a laser beam that has the shape controlled by the optical system. The pre-mask (MC) includes a first pattern groove (PT1,PT3) defined on a front surface (S1,S3) and a second pattern groove (PT2,PT4) defined on a rear surface (S2,S4) that corresponds to the front surface. A first portion (M1,M3) and a second portion (M2,M4) are defined in a first direction that is a thickness direction of the pre-mask. The laser beam with the controlled shape is irradiated to the second portion of the pre-mask in a second direction crossing the first direction, a mask having an opening, in which the second portion is removed, is provided.

Anmelder

Firma

Samsung Display Co., Ltd.

Land

🇰🇷 Südkorea

Fachgebiete