Ladungsteilchenstrahlvorrichtung mit Detektorhaltevorichtung

Details

Veröffentlichungs-Nr.

EP3483914

Aktenzeichen

EP18204933

Anmeldetag

7. November 2018

Veröffentlichung

1. Juni 2022

Erteilung

1. Juni 2022

Rechtsraum

EP

IPC

H01J37/244G01N23/04

Abstract

A charged particle beam device includes: a detection chamber flange 140; a detector 30; a detector holding stand 110 which holds the detector; a first shaft 120 which is slidably inserted into a guide hole 144 and connected to the detector holding stand, the guide hole being provided in the detection chamber flange. The device may further include a first flange 170 which is attached to the detection chamber flange and has a spherical bearing; a second flange180 which is supported by the spherical bearing of the first flange; and a second shaft 122 which is slidably inserted into a guide hole 182 provided in the second flange and passes through a through-hole 146 in the detection chamber flange to be connected to the detector holding stand, each of the first shaft and the second shaft being provided with a flow channel 121,122 of a heat transfer medium for cooling or heating the detector.

Anmelder

Firmen

JEOL LTD.
Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete