Infrarotdetektor mit Geringer Drift

Details

Veröffentlichungs-Nr.

EP3486623

Aktenzeichen

EP17202450

Anmeldetag

17. November 2017

Veröffentlichung

30. Oktober 2019

Erteilung

30. Oktober 2019

Rechtsraum

EP

IPC

G01J5/12G01J5/02G01J5/06G01J5/22G01J5/00

Abstract

A semiconductor device (100) for measuring IR radiation comprising: at least one sensor pixel (10); at least one reference pixel (20) shielded from said IR radiation comprising a heater (23); a controller (50) adapted for: measuring a responsivity by applying power to the heater, while not heating the sensor pixel; measuring a first output signal of an unheated pixel and a first reference output signal of the heated pixel, obtaining the responsivity as a function of a measure of the applied power to the heater and of the difference between the first output signal and the first reference output signal; applying a period of cooling down until the temperature of the reference pixel and the sensor pixel are substantially the same; generating the output signal indicative of the IR radiation, based on the difference between the sensor and the reference output signal, by converting this difference using the responsivity.

Anmelder

Firma

Melexis Technologies NV

Land

🇧🇪 Belgien

Fachgebiete