Verfahren und System zum Messen eines Höhenprofils einer Objektoberfläche und Computerprogramm und Datenträger zur Verwendung in dem Verfahren

Details

Veröffentlichungs-Nr.

EP3511674

Aktenzeichen

EP18151625

Anmeldetag

15. Januar 2018

Veröffentlichung

21. Juli 2021

Erteilung

21. Juli 2021

Rechtsraum

EP

IPC

G01B11/24G01B11/06G01B9/02

Abstract

In a method and system for measuring a height map of a surface of an object, the following steps are carried out. Height maps of different sections of the surface of the object are measured, using an optical profilometer having a field of view, FOV, covering an individual section, wherein each height map comprises height data. The measured height maps are grouped into different sets of height maps, wherein within each set each one of the height maps of the set has a valid overlap to at least one other height map of the set, and wherein each height map belongs to one set and does not have a valid overlap with any height map of another set. Within each set, the measured height maps are stitched to a sub-composite stitched height map. The sub-composite stitched height maps are combined to a composite height map.

Anmelder

Firma

Mitutoyo Corporation

Land

🇯🇵 Japan

Fachgebiete