Redox-Atomlagenabscheidung
Anmelder: IMEC vzw, Katholieke Universiteit Leuven KU Leuven Research & Development 🇧🇪
Details
- Veröffentlichungs-Nr.
- EP3575004
- Aktenzeichen
- EP18174756
- Anmeldetag
- 29. Mai 2018
- Veröffentlichung
- 28. Juni 2023
- Erteilung
- 28. Juni 2023
- Rechtsraum
- EP
- IPC
- B05D1/18C23C18/16C23C18/18// B05D7/14
Abstract
Method to deposit a layer of inorganic material on a substrate surface, comprising one or more cycles, each cycle comprising the steps of:a) contacting the substrate surface with a first aqueous liquid solution comprising an organic compound having a functional group permitting its adsorption on the substrate, followed byb) contacting the substrate surface having the organic compound adsorbed thereon with a second liquid aqueous solution comprising an inorganic ion or an ion complex suitable for oxidizing the organic compound and having an insoluble reduction product which is the inorganic material.
Anmelder
- Firmen
- IMEC vzw
Katholieke Universiteit Leuven KU Leuven Research & Development - Land
- 🇧🇪 Belgien
Technologietransferstelle der belgischen Katholieke Universiteit Leuven, verwaltet geistiges Eigentum und überführt Forschungsergebnisse in Lizenzen und Ausgründungen.
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