Röntgenanalysator und Verfahren zum Korrigieren der Zählrate
Anmelder: JEOL Ltd., Jeol Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP3611543
- Aktenzeichen
- EP19191938
- Anmeldetag
- 15. August 2019
- Veröffentlichung
- 2. März 2022
- Erteilung
- 2. März 2022
- Rechtsraum
- EP
- IPC
- G01T1/17
Abstract
An X-ray analyzer (100) includes: an X-ray detector (16b) that detects an X-ray emitted from a specimen (S) and outputs a signal a step of which has a height corresponding to energy of the X-ray; a pulse generation circuit (34) that converts the signal output from the X-ray detector (16b) into a first pulse signal; a pulse-width setting circuit (36) that sets a pulse width; a pulse-width conversion circuit (38) that converts a pulse width of the first pulse signal into the pulse width set by the pulse-width setting circuit (36) to form a second pulse signal; a pulse-height discriminator (40) that discriminates the second pulse signal according to a pulse height of the second pulse signal; a counting circuit (50) that calculates a counting rate of the discriminated second pulse signal; and a counting-loss correction processing unit (62) that corrects the counting rate calculated by the counting circuit (50), and the counting-loss correction processing unit (62) corrects the counting rate based on the pulse width set by the pulse-width setting circuit (36).
Anmelder
- Firmen
- JEOL Ltd.
Jeol Ltd. - Land
- 🇯🇵 Japan
Japanisches Unternehmen mit Sitz in Tokio, das wissenschaftliche und industrielle Präzisionsgeräte entwickelt, darunter Elektronenmikroskope, Analysegeräte und Halbleiterfertigungsanlagen.
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