Ladungspartikelmikroskop mit Manipulatorvorrichtung und Verfahren zur Herstellung einer Probe mit Diesem Ladungspartikelmikroskop

Details

Veröffentlichungs-Nr.

EP3613543

Aktenzeichen

EP18190045

Anmeldetag

21. August 2018

Veröffentlichung

7. Januar 2026

Erteilung

7. Januar 2026

Rechtsraum

EP

IPC

B25J7/00B25J15/08H01J37/20

Abstract

The invention relates to a charged particle microscope (CPM) comprising a sample holder, for holding a sample; an ion beam column, for producing an ion beam that propagates along an ion axis onto said sample for creating a lamella in said sample; and a detector, for detecting radiation emanating from said lamella and/or said sample in response to irradiation by said ion beam. The CPM comprises a controller for at least partially controlling operation of said microscope. According to the invention, a manipulator device is provided that is arranged for transferring said lamella created in said sample out of said sample, wherein said manipulator device comprises a first elongated manipulator member with a first outer end, and a second elongated manipulator member with a second outer end. The outer ends are movable for mechanically gripping and releasing said lamella. In embodiments, the elongated manipulator members comprise off-set parts that increase manoeuvrability (accessibility) and monitorability of the manipulator device during use.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete