Komponententräger mit einer Belichtbaren Dielektrischen Schicht und einer Strukturierten Leitfähigen Schicht als Maske zur Selektiven Belichtung der Belichtbaren Dielektrischen Schicht mit Elektromagnetischer Strahlung

Details

Veröffentlichungs-Nr.

EP3621103

Aktenzeichen

EP19193661

Anmeldetag

27. August 2019

Veröffentlichung

27. Oktober 2021

Erteilung

27. Oktober 2021

Rechtsraum

EP

IPC

H01L21/48H01L23/13H01L23/498

Abstract

It is described a component carrier (100) comprising (a) a layer stack (110) comprising at least one component carrier material; and (b) a photoimagable dielectric layer structure (120) formed on top of the layer stack (110). The photoimagable dielectric layer structure (120) has at least one recess (122) extending vertically through the photoimagable dielectric layer structure (120). The at least one recess (122) is formed by partially removing the photoimagable dielectric layer structure (120) in regions which are defined by a spatial pattern of an electrically conductive layer structure (130) being formed on the photoimagable dielectric layer structure (120). The spatial pattern comprises openings (132) formed within the electrically conductive layer structure (130). It is further described a method for manufacturing such a component carrier (100).

Anmelder

Firma

AT & S Austria Technologie & Systemtechnik Aktiengesellschaft

Land

🇦🇹 Österreich

Fachgebiete