Gasanalysevorrichtung und Gasanalyseverfahren

Details

Veröffentlichungs-Nr.

EP3644344

Aktenzeichen

EP19196202

Anmeldetag

9. September 2019

Veröffentlichung

24. April 2024

Erteilung

24. April 2024

Rechtsraum

EP

IPC

H01J49/14H01J49/04

Abstract

A gas analysis device of this invention is to conduct a quantitative analysis on a mixed gas containing an object substance to be measured and an object substance not to be measured whose mass number is the same or near that of the object substance to be measured by the use of a quadruple mass spectrometer. The gas analysis device comprises a mixed gas generation mechanism that comprises a heating furnace that heats a crucible where a sample is put while introducing a carrier gas to be an object substance not to be measured, generates a sample gas that contains an object substance to be measured by vaporizing at least a part of the sample and discharges a mixed gas comprising the carrier gas and the sample gas, a quadruple mass spectrometer that has a measurement space into which the mixed gas generated by the mixed gas generation mechanism is introduced and that conducts a quantitative analysis on the object substance to be measured by giving energy to the object substance to be measured and the object substance not to be measured in the measurement space, and a pressure control mechanism that adjusts pressure in the measurement space, and the pressure control mechanism adjusts the pressure in the measurement space so as to change the energy that is given to the object substance not to be measured in the measurement space according to the lower limit value of ionization energy of the object substance not to be measured.

Anmelder

Firmen

HORIBA, Ltd.
HORIBA STEC, Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete