Vorrichtung zur Prüfung einer Integrierten Schaltung mit Optoelektronischem Emitter, Herstellungsanlage und Zugehöriges Prüf- und Herstellungsverfahren

Details

Veröffentlichungs-Nr.

EP3657535

Aktenzeichen

EP18382831

Anmeldetag

20. November 2018

Veröffentlichung

15. Februar 2023

Erteilung

15. Februar 2023

Rechtsraum

EP

IPC

H01L21/66G01J1/42G01J1/04G01J1/02G01N21/958G01N21/88

Abstract

A checking device for an integrated circuit having an optoelectronic emitter defining an axis of emission of a beam of electromagnetic radiation comprising electrical connecting means for connecting the optoelectronic emitter to a source of electrical energy, reflecting means (13) suitable for being positioned around the optoelectronic emitter, a convergent lens (17) the optical axis of which coincides with the axis of emission, an opaque sheet (18) having a plurality of holes, and a measuring module (4) suitable for receiving the electromagnetic radiation coming from the convergent lens (17). The device may be included in a manufacturing plant and perform a checking process in which there is performed an evaluation of some real values indicative of the amount of electromagnetic radiation emitted by said optoelectronic emitter depending on the direction and it is compared with some ranges of pre-set reference values.

Anmelder

Firmen

Simulacions Optiques S.L.
Universitat Politècnica De Catalunya

Land

🇪🇸 Spanien

Fachgebiete