Mikroelektromechanische Vorrichtung mit einer durch Piezoelektrische Ansteuerung Kippbaren Struktur mit Verbesserten Mechanischen und Elektrischen Eigenschaften

Details

Veröffentlichungs-Nr.

EP3666727

Aktenzeichen

EP19165958

Anmeldetag

28. März 2019

Veröffentlichung

2. Oktober 2024

Erteilung

2. Oktober 2024

Rechtsraum

EP

IPC

B81B3/00G02B26/08

Abstract

A microelectromechanical device (20), has: a fixed structure (24) defining a cavity (23); a tiltable structure (22), elastically suspended in the cavity (23) and having a main extension in a horizontal plane (xy); a piezoelectrically driven actuation structure (30), which can be biased for causing rotation of the tiltable structure (22) about at least one first rotation axis (X) belonging to the horizontal plane (xy) and is interposed between the tiltable structure (22) and the fixed structure (24). The actuation structure (30) has at least one first pair of driving arms (32a, 32b), which carry respective regions of piezoelectric material (33) and are elastically coupled to the tiltable structure on opposite sides of the first rotation axis (X), by means of respective elastic decoupling elements (34a, 34b), which have a high stiffness in regard to movements out of the horizontal plane (xy) and are compliant in regard to torsion about the first rotation axis (X) .

Anmelder

Firma

STMicroelectronics S.r.l.

Land

🇮🇹 Italien

Fachgebiete