Rastertransmissions-Elektronenmikroskop und Aberrationskorrekturverfahren

Details

Veröffentlichungs-Nr.

EP3690922

Aktenzeichen

EP20150281

Anmeldetag

3. Januar 2020

Veröffentlichung

5. Mai 2021

Erteilung

5. Mai 2021

Rechtsraum

EP

IPC

H01J37/153H01J37/26H01J37/28

Abstract

In a scanning transmission electron microscope, a control unit performs: processing of calculating a first auto-correlation function that is an auto-correlation function of a first scanning transmission electron microscope image; processing of acquiring a first intensity profile along a straight line that passes through a center of the first auto-correlation function; processing of obtaining a position of an inflection point that is closest to the center of the first auto-correlation function in the first intensity profile and adopting an intensity at the position as a first reference intensity; processing of obtaining an aberration coefficient by fitting a first aberration function to an isointensity line that connects positions where intensity is equal to the first reference intensity in the first auto-correlation function and by fitting a second aberration function to an isointensity line that connects positions where intensity is equal to a second reference intensity in a second auto-correlation function; and processing of controlling an electron optical system based on the aberration coefficient.

Anmelder

Firmen

JEOL Ltd.
Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete