Ausgeglichenes Mehrachsiges Gyroskop

Details

Veröffentlichungs-Nr.

EP3696501

Aktenzeichen

EP20154071

Anmeldetag

28. Januar 2020

Veröffentlichung

23. März 2022

Erteilung

23. März 2022

Rechtsraum

EP

IPC

G01C19/574

Abstract

A microelectromechanical gyroscope comprises a first proof mass quartet centred around a first quartet center point and a second proof mass quartet centred around a second quartet center point. The gyroscope comprises a suspension arrangement configured to accommodate the primary and secondary oscillating motion of the first and second proof mass quartets. The suspension arrangement comprises a first synchronization frame and a second synchronization frame. Each synchronization frame surrounds the corresponding proof mass quartet, and each proof mass is coupled to the surrounding synchronization frame with one or more frame suspension springs. The gyroscope also comprises a lateral synchronization spring which extends from the first proof mass quartet to the second proof mass quartet.

Anmelder

Firma

Murata Manufacturing Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete