Röntgenstrahlenanalysator

Details

Veröffentlichungs-Nr.

EP3745122

Aktenzeichen

EP20176853

Anmeldetag

27. Mai 2020

Veröffentlichung

1. Mai 2024

Erteilung

1. Mai 2024

Rechtsraum

EP

IPC

G01N23/225G01N23/207G01N23/223G01N23/2209

Abstract

An X-ray analyzer (100) includes: a specimen stage (15); a spectrometer (18) having a spectroscopic element and an X-ray detector (17); a temperature measuring unit (20) including at least one of a first temperature sensor (22) for measuring a temperature of the specimen stage (15) and a second temperature sensor (24) for measuring a temperature of the spectrometer (18); a storage unit (42) which stores calibration data of the spectrometer (18), and a previous measurement result by the temperature measuring unit (20) at the time of execution of the calibration of the spectrometer (18); and a notifying unit (34) which acquires a measurement result by the temperature measuring unit (20), calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit (42), and notifies that calibration is needed, based on the temperature variation amount.

Anmelder

Firmen

JEOL Ltd.
Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete