Elektronenkanone, Elektronenmikroskop, Vorrichtung zur Dreidimensionalen Generativen Fertigung und Verfahren zur Anpassung des Stroms einer Elektronenkanone

Details

Veröffentlichungs-Nr.

EP3806130

Aktenzeichen

EP20199943

Anmeldetag

2. Oktober 2020

Veröffentlichung

19. Mai 2021

Rechtsraum

EP

IPC

H01J37/075H01J37/09H01J37/24

Abstract

An electron gun includes a cathode that is heated to emit thermions; a cathode heating power supply that supplies a cathode heating current for heating the cathode; a grid that has a first aperture formed therein and that has a grid voltage applied thereto, the grid voltage having a potential lower than that of the cathode, wherein the grid converges the thermions passing through the first aperture by the grid voltage; an anode that has a second aperture formed therein and that has an anode voltage applied thereto, wherein the anode causes the thermions extracted from the cathode to pass through the second aperture as an electron beam by the anode voltage; an anode-voltage power supply that applies the anode voltage to the anode; and a controller that causes the anode voltage having a positive potential to be applied from the anode-voltage power supply to the anode.

Anmelder

Firma

Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete