Verfahren und Spitzensubstrat für Rastersondenmikroskopie

Details

Veröffentlichungs-Nr.

EP3809143

Aktenzeichen

EP19203758

Anmeldetag

17. Oktober 2019

Veröffentlichung

19. Juli 2023

Erteilung

19. Juli 2023

Rechtsraum

EP

IPC

G01Q70/06

Abstract

The invention is related to a method for performing SPM measurements, wherein a sample (3) is attached to a cantilever (4) and scanned across a tip. The tip is one of several tips present on a substrate (1) comprising at least two different types of tips (2a,2b) on its surface, thereby enabling to perform multiple SPM measurements requiring a different type of tip, without replacing the cantilever. The at least two different types of tips are different in terms of their material, in terms of their shape or size, and/or in terms of the presence or the type of active or passive components mounted on or incorporated in the substrate, and associated to tips of one or more of the different types (2a,2b). The invention is equally related to a substrate (1) comprising a plurality of tips suitable for use in the method of the invention.

Anmelder

Firma

Imec VZW

Land

🇧🇪 Belgien

Fachgebiete