Verfahren zur Herstellung einer Kapillare für eine Photonische Hohlkernkristallfaser
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP3819267
- Aktenzeichen
- EP20203995
- Anmeldetag
- 27. Oktober 2020
- Veröffentlichung
- 29. Juni 2022
- Erteilung
- 29. Juni 2022
- Rechtsraum
- EP
- IPC
- C03B37/012C03B37/027C03C15/00C03C25/68G02B5/00
Abstract
Disclosed is a method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method comprises obtaining a capillary having capillary wall comprising a first wall thickness; and chemically etching the capillary walls to reduce the wall thickness of the capillary wall. During performance of said etching step a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching step, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured to such a method and various devices comprising such a capillary.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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ASML Netherlands B.V
ASML Netherlands B.V · Veldhoven