System und Verfahren zur Photo-Akustischen Inspektion eines Objekts
Anmelder: Imec VZW, Universiteit Gent 🇧🇪
Details
- Veröffentlichungs-Nr.
- EP3869191
- Aktenzeichen
- EP20158675
- Anmeldetag
- 21. Februar 2020
- Veröffentlichung
- 25. August 2021
- Rechtsraum
- EP
- IPC
- G01N29/24G01N21/17
Abstract
System (300) for photoacoustic inspection of an object (10). The system comprises: an emission source (305<sub>1</sub>, ..., 305<sub>N</sub>) configured to generate an emission beam (315<sub>1</sub>, ..., 315<sub>N</sub>); a direction apparatus (320) configured to sequentially direct the emission beam to a plurality of locations (15<sub>11</sub>, ..., 15<sub>NM</sub>) on the object to generate a plurality of acoustic waves within the object, wherein the plurality of locations and times are such that the plurality of acoustic waves at least semi-constructively interfere to generate a propagating acoustic wave (20<sub>1</sub>, ... 20<sub>M</sub>) within the object; and a vibration sensing system (330) configured to detect said propagating acoustic wave at at least one detection location (25<sub>1</sub>, ... 25<sub>M</sub>) on the object. As the propagating acoustic wave has an amplitude that is greater than any one of the plurality of acoustic waves, it is easier to detect by the vibration sensing system thereby improving the SNR.
Anmelder
- Firmen
- Imec VZW
Universiteit Gent - Land
- 🇧🇪 Belgien
Belgische Universität in Gent, betreibt Lehre und Forschung in einem breiten Spektrum wissenschaftlicher und technischer Disziplinen.
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