Mems-Beschleunigungsmesser mit Mechanisch Entkoppelter Prüfmasse

Details

Veröffentlichungs-Nr.

EP3882641

Aktenzeichen

EP21161170

Anmeldetag

8. März 2021

Veröffentlichung

15. Februar 2023

Erteilung

15. Februar 2023

Rechtsraum

EP

IPC

G01P15/125G01P15/18G01P15/08B81B5/00

Abstract

The present invention relates to MEMS (microelectromechanical systems) accelerometers, in particular to an accelerometer designed to reduce error in the accelerometer output. The MEMS accelerometer includes a proof mass, which is capable of movement along at least two perpendicular axes and at least one measurement structure. The proof mass is mechanically coupled to the measurement structure along the sense axis of the measurement structure, such that movement of the proof mass along the sense axis causes the moveable portion of the measurement structure to move, and is decoupled from the measurement structures along an axis or axes perpendicular to the sense axis of the measurement structure, such that movement of the proof mass perpendicular to the sense axis of the measurement structure does not cause the moveable portion of the measurement structure to move.

Anmelder

Firma

Murata Manufacturing Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete