Analyseverfahren und Röntgenfluoreszenzanalysator

Details

Veröffentlichungs-Nr.

EP3885758

Aktenzeichen

EP21161439

Anmeldetag

9. März 2021

Veröffentlichung

6. August 2025

Erteilung

6. August 2025

Rechtsraum

EP

IPC

G01N23/223

Abstract

An analysis method using an X-ray fluorescence analyzer (100) is provided in which an X-ray spectrum is acquired by detecting a secondary X-ray emitted from a specimen (S) when the specimen (S) is irradiated with a primary X-ray. The analysis method includes: acquiring a first X-ray spectrum obtained, with a take-off angle of the secondary X-ray being set as a first take-off angle; acquiring a second X-ray spectrum obtained, with a take-off angle of the secondary X-ray being set as a second take-off angle that is different from the first take-off angle; and obtaining information on an element in a depth direction of a specimen (S) based on the first X-ray spectrum and the second X-ray spectrum.

Anmelder

Firmen

JEOL Ltd.
Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete