Manipulator, Manipulatoranordnung, Geladenes Teilchenwerkzeug, Mehrstrahliges Teilchenwerkzeug und Verfahren zum Manipulieren eines Geladenen Teilchenstrahls

Details

Veröffentlichungs-Nr.

EP3923315

Aktenzeichen

EP20179514

Anmeldetag

11. Juni 2020

Veröffentlichung

24. Januar 2024

Erteilung

24. Januar 2024

Rechtsraum

EP

IPC

H01J37/12H01J37/147H01J37/153H01J37/28H01J37/317

Abstract

A manipulator for manipulating a charged particle beam in a projection system, the manipulator comprising a substrate having opposing major surfaces in each of which is defined an aperture and a through-passage having an interconnecting surface extending between the apertures; wherein the interconnecting surface comprises one or more electrodes; the manipulator further comprising a potential divider comprising two or more resistive elements connected in series, the potential divider comprising an intermediate node between each pair of adjacent resistive elements, wherein at least one resistive element is formed within the substrate so as to extend between the opposing major surfaces; wherein the intermediate node is electrically connected to at least one of the one or more electrodes.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete