Fortschrittskontrolle des Materialabtrags einer Komponententrägerstruktur Während eines Qualitätstests

Details

Veröffentlichungs-Nr.

EP3982133

Aktenzeichen

EP20201301

Anmeldetag

12. Oktober 2020

Veröffentlichung

18. September 2024

Erteilung

18. September 2024

Rechtsraum

EP

IPC

G01R31/28

Abstract

Apparatus (100) for processing a component carrier structure (102) for a quality test, wherein the apparatus (100) comprises a material removal unit (112) configured for removing material of the component carrier structure (102) for exposing at least one test target (116) in an interior of the component carrier structure (102) to be subjected to the quality test, a progress measuring unit (250) configured for measuring a progress of the removal of material of the component carrier structure (102), an analysis unit (252) configured for analyzing whether the measured progress meets requirements of a predefined material removal objective, and a control unit (254) configured for controlling, based on a result of the analysis, whether or not the sequence of removing material, measuring a progress thereof, and analyzing whether the measured progress meets the requirements of the predefined material removal objective has to be repeated.

Anmelder

Firma

AT & S Austria Technologie & Systemtechnik Aktiengesellschaft

Land

🇦🇹 Österreich

Fachgebiete