Röntgenmessvorrichtung und Röntgenmessverfahren
Anmelder: JEOL Ltd., Jeol Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP3995820
- Aktenzeichen
- EP21206472
- Anmeldetag
- 4. November 2021
- Veröffentlichung
- 12. Februar 2025
- Erteilung
- 12. Februar 2025
- Rechtsraum
- EP
- IPC
- G01N23/2209
Abstract
In a preliminary measurement, spectrums obtained by detecting characteristic X-rays emitted from preliminary measurement points are transmitted to a spectrum processing unit (20) via a noise filter unit (22). In a main measurement, a spectrum obtained by detecting characteristic X-rays emitted from a main measurement point is transmitted to the spectrum processing unit (20) by bypassing the noise filter unit (22). The noise filter unit (22) includes a machine learning type filter constituted of a CNN or the like. In a learning process, teacher data are generated using artificially-generated noise.
Anmelder
- Firmen
- JEOL Ltd.
Jeol Ltd. - Land
- 🇯🇵 Japan
Japanisches Unternehmen mit Sitz in Tokio, das wissenschaftliche und industrielle Präzisionsgeräte entwickelt, darunter Elektronenmikroskope, Analysegeräte und Halbleiterfertigungsanlagen.
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