Tomographisches Verfahren zur Bestimmung einer 3D-Karte eines Ladungssammlungswirkungsgrades und Vorrichtung zur Durchführung des Verfahrens

Details

Veröffentlichungs-Nr.

EP4006530

Aktenzeichen

EP20210322

Anmeldetag

27. November 2020

Veröffentlichung

27. November 2024

Erteilung

27. November 2024

Rechtsraum

EP

IPC

G01N23/046H01L21/66G06T7/00

Abstract

A tomographic method of determining a 3D map of a charge collection efficiency in a volume of investigation of a sample and an apparatus for performing the method. The sample has a charge carrier selecting structure and the method comprises the steps of: Arranging the sample in a beam path of a probe beam, wherein the probe beam propagates in a beam-direction which defines an axis in a laboratory frame coordinate system, Scanning the volume of investigation with an analyzing spot of the probe beam and simultaneously measuring the beam induced current and/or voltage, wherein a position of the sample arranged on a sample stage is defined by the coordinates z, y and r and a value of the beam induced current and/or voltage is determined for every position of the sample during the scanning action and Assigning every coordinate point (z, y, r) in the laboratory frame coordinate system, at which the analyzing spot of the probe beam hits the sample to a value of the beam induced current and/or voltage, which is measured for this point (z, y, r), reconstructing the 3D map of the charge collection efficiency by processing the values of the beam induced current and/or voltage determined for the coordinates (z, y, r) in the laboratory frame coordinate system with a tomographic image reconstruction algorithm so as to determine the 3D map of the charge collection efficiency in a coordinate system of the sample.

Anmelder

Firmen

Deutsches Elektronen-Synchrotron DESY
Arizona Board of Regents on behalf of Arizona State University

Land

🇩🇪 Deutschland

Fachgebiete