Piezoelektrisches Frequenzmoduliertes Gyroskop

Details

Veröffentlichungs-Nr.

EP4008998

Aktenzeichen

EP21209833

Anmeldetag

23. November 2021

Veröffentlichung

31. Juli 2024

Erteilung

31. Juli 2024

Rechtsraum

EP

IPC

G01C19/5733

Abstract

A gyroscope comprising a proof mass, a first transduction / suspension structure which is coupled to the proof mass with a laterally flexible first coupling spring from a first coupling direction, a second transduction / suspension structure which is coupled to the proof mass with a laterally flexible second coupling spring from a second coupling direction, a third transduction / suspension structure which is coupled to the proof mass with a transversally flexible third coupling spring from a third coupling direction, and a fourth transduction / suspension structure which is coupled to the proof mass with a transversally flexible fourth coupling spring from a fourth coupling direction. Each transduction / suspension structure comprises elongated beams. Piezoelectric transducers have been deposited on at least some elongated beams. These transducers are configured to bend the corresponding elongated beams in the device plane and to measure the bending of the corresponding lateral elongated beams in the device plane.

Anmelder

Firma

Murata Manufacturing Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete