Breitbandstrahlungsgenerator mit Hohlkern auf der Basis von Photonischen Kristallfasern

Details

Veröffentlichungs-Nr.

EP4012494

Aktenzeichen

EP21208721

Anmeldetag

17. November 2021

Veröffentlichung

15. Juni 2022

Rechtsraum

EP

IPC

G02F1/35G02F1/365

Abstract

A broadband light source device, being configured for generating a broadband output radiation upon receiving pump radiation, comprising: a hollow-core photonic crystal fiber (HC-PCF) comprising at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein said at least one structurally varied portion comprises at least a first structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein said at least one structurally varied portion is configured and located such that said broadband output radiation comprises wavelengths in the ultraviolet region.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete