Behälter zum Zuführen eines Vorläufermaterials

Details

Veröffentlichungs-Nr.

EP4056730

Aktenzeichen

EP21161744

Anmeldetag

10. März 2021

Veröffentlichung

17. Juli 2024

Erteilung

17. Juli 2024

Rechtsraum

EP

IPC

C23C16/448C30B25/14C30B35/00F17C11/00B01B1/00B01D1/00

Abstract

The invention relates to a container (1) for vaporizing a precursor material and delivering the vaporized precursor material, comprising:- a receiving part (12) bounding an inner volume;- a number of subcarrier trays (4) arranged on top of each other within the inner volume;- each subcarrier tray (4) forming a gas flow channel, at least one of the subcarrier trays (4) comprising:∘ a subcarrier holder (41) configured to store the precursor material, and∘ a holder lid (42) configured to close the subcarrier holder (41) wherein the holder lid is provided with one or more fins (44) protruding downwardly towards the subcarrier holder (41) to form a gas flow channel (C) covering substantially the whole area of the precursor material.

Anmelder

Firmen

SK Specialty Co., Ltd.
SK Inc.
UMICORE AG & Co. KG

Land

🇰🇷 Südkorea

Fachgebiete