Vakuumventil

Details

Veröffentlichungs-Nr.

EP4092298

Aktenzeichen

EP22169276

Anmeldetag

21. April 2022

Veröffentlichung

15. Februar 2023

Rechtsraum

EP

IPC

F16K31/50F16K1/36F16K31/04F16K41/10F16K51/02F16J15/02

Abstract

The present invention relates to a vacuum valve (10) for high- or ultra-high vacuum systems, the vacuum valve (10) comprising a valve housing (12) defining a passage connecting a first (18) and a second (20) opening of the valve housing (12), a valve body and a complementary seat (60) disposed in the passage, the valve body and/or the seat (60) comprising a seal member (52) and the valve body being movable in a linear axial direction along between an open position and a closed position, wherein the valve body cooperates with the seat (60) in the closed position so as to close the first opening gas tightly, and an electromechanical actuation unit for actuating the valve body, the actuation unit comprising an electric motor (34) and a mechanical conversion unit with an input portion drivingly connected to the electric motor (34) and an output portion drivingly connected to the valve body, wherein the mechanical conversion unit converts a rotational output of the electrical motor (34) into a linear movement of an output portion to move the valve body in the axial direction. The present invention further relates to method operating that vacuum valve and to a vacuum valve comprising a low force seal member. One advantage associated with vacuum valves according to the present invention is that they have a comparatively low energy consumption.

Anmelder

Firma

Pfeiffer Vacuum Technology AG

Land

🇩🇪 Deutschland

Fachgebiete