Vorrichtung und Verfahren zur Probenbearbeitung

Details

Veröffentlichungs-Nr.

EP4098995

Aktenzeichen

EP22176775

Anmeldetag

1. Juni 2022

Veröffentlichung

28. Mai 2025

Erteilung

28. Mai 2025

Rechtsraum

EP

IPC

G01N1/32H01J37/22H01J37/305H01J37/30H01J37/302

Abstract

A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a shielding member disposed on the specimen to block the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, a coaxial illumination device for irradiating the specimen with illumination light along an optical axis of the camera, and a processing unit for determining whether to terminate the machining based on an image photographed by the camera, wherein the processing unit performs processing for acquiring information indicating a target machined width, processing for acquiring the image, processing for measuring a machined width on the acquired image, and processing for terminating the machining when the measured machined width equals or exceeds the target machined width.

Anmelder

Firmen

JEOL Ltd.
Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete