Integrierte Optoelektronische Vorrichtung mit Optischer Verbindungsstruktur zur Verbesserten Integration von Beol-Vorrichtung

Details

Veröffentlichungs-Nr.

EP4102272

Aktenzeichen

EP21178302

Anmeldetag

8. Juni 2021

Veröffentlichung

19. Februar 2025

Erteilung

19. Februar 2025

Rechtsraum

EP

IPC

G02B6/12G02B6/122G02B6/13H01L21/02H01L31/0232H01S5/02H01S5/10H01S5/14// G02B6/14G02B6/42

Abstract

An integrated optoelectronic device (100) comprises a substrate (102) with a silicon layer (104) that comprises one or more electronic components. An interconnect stack (114) is arranged on the substrate (102) and comprising a plurality of metal levels (M1, M2, M3). An optical waveguide, herein FEOL wave-guide (130), on the substrate (102) has an optical FEOL coupling section (130.1). A photonic component (122) is arranged in the interconnect stack (114) at a vertical distance from the substrate (102). An optical waveguide in the interconnect stack (114), herein BEOL waveguide (128), is optically coupled to the photonic component (122) and has an optical BEOL coupling section (128.2). An optical interconnect structure (132) is arranged and configured for optically coupling radiation from the BEOL coupling section (128.2) into the FEOL coupling section (130.1) and vice versa. The optical interconnect structure (132) comprises a vertical stack of optically coupled wave-guide elements (132.1-132.4) made of a first dielectric material, which each are embedded in a second dielectric material and which in a desired wavelength range have an index of refraction of a higher value than the embedding second dielectric material. The optically coupled waveguide elements (132.1-132.4) are arranged and configured for receiving optical radiation in the desired wavelength range from the BEOL coupling section (128.2) or the FEOL coupling section (130.1) by coupling the optical radiation into at least one of the waveguide elements, and for cooperatively forming and sustaining, using the coupled optical radiation, one or more supermodes of optical radiation that vertically extend across the vertical stack of coupled optically coupled waveguide elements (132.1-132.4), and for coupling the one or more supermodes into the FEOL coupling section (130.1) or the BEOL coupling section (128.2), respectively.

Anmelder

Firma

IHP GmbH - Innovations for High Performance Microelectronics / Leibniz-Institut für innovative Mikroelektronik

Land

🇩🇪 Deutschland

Fachgebiete