Optisches Element zur Erzeugung von Breitbandiger Strahlung

Details

Veröffentlichungs-Nr.

EP4105696

Aktenzeichen

EP21179394

Anmeldetag

15. Juni 2021

Veröffentlichung

21. Dezember 2022

Rechtsraum

EP

IPC

G02B6/00G03F1/00G02F1/365G02B6/02C03B37/012G03F7/20// B82Y20/00

Abstract

In this document a monolithic optical element for generating broadband radiation upon receiving input radiation at an input end of the optical element is disclosed, the optical element comprising: a hollow core region for guiding the input radiation along a longitudinal axis of the optical element towards and output end of the optical element; a cladding region surrounding the core region along the longitudinal axis and comprising transversally arranged micro-structures configured to provide non-linear optical behaviour to the optical element causing the generation of the broadband radiation; and a supporting region surrounding the cladding region along the longitudinal axis of at least part of the optical element, characterized in that the supporting region has a transversal dimension which is sufficiently large to render said at least part of the optical element substantially rigid.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete