Vorrichtung und Verfahren zur Ionenstrahl-Probenbearbeitung

Details

Veröffentlichungs-Nr.

EP4120318

Aktenzeichen

EP22184620

Anmeldetag

13. Juli 2022

Veröffentlichung

17. Mai 2023

Rechtsraum

EP

IPC

H01J37/304H01J37/305H01J37/22

Abstract

Provided is a specimen (2) machining device (100) including: an illumination system (40) that includes a first illumination device and a second illumination device which illuminate a specimen (2) from directions different from each other; a camera (60) that photographs the specimen (2); and a processing unit (70) that controls the illumination system (40) and the camera (60), and acquires a machining control image which is used for controlling an ion source (10) and a display image which is displayed on a display unit. The processing unit (70) performs processing for: controlling the illumination system (40) to illuminate the specimen (2) under a machining illumination condition; acquiring the machining control image by controlling the camera (60) to photograph the specimen (2) illuminated under the machining control illumination condition; controlling the ion source (10) based on the machining control image; controlling the illumination system (40) to illuminate the specimen (2) under a display illumination condition which is different from the machining control illumination condition; acquiring the display image by controlling the camera (60) to photograph the specimen (2) illuminated under the display illumination condition; and displaying the display image on the display unit.

Anmelder

Firma

Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete