Verfahren zum Herstellen eines Kapazitiven Drucksensors und Kapazitiver Drucksensor

Details

Veröffentlichungs-Nr.

EP4140942

Aktenzeichen

EP22190178

Anmeldetag

12. August 2022

Veröffentlichung

4. März 2026

Erteilung

4. März 2026

Rechtsraum

EP

IPC

B81C1/00

Abstract

Method for manufacturing a micro-electro-mechanical device (30; 30'), comprising the steps of: forming, on a substrate (2), a first protection layer (5) of crystallized aluminum oxide, impermeable to HF; forming, on the first protection layer (5), a sacrificial layer (8, 8') of silicon oxide removable with HF; forming, on the sacrificial layer (8, 8'), a second protection layer (15) of crystallized aluminum oxide; exposing a sacrificial portion (8') of the sacrificial layer (8, 8'); forming, on the sacrificial portion (8'), a first membrane layer (20) of a porous material, permeable to HF; forming a cavity (22) by removing the sacrificial portion (8') through the first membrane layer (20); and sealing pores of the first membrane layer (20) by forming a second membrane layer (24) on the first membrane layer (20).

Anmelder

Firma

STMicroelectronics S.r.l.

Land

🇮🇹 Italien