Selbsttest eines Mems-Beschleunigungsmessers unter Verwendung einer Variablen Erregerspannung und Fester Zeitsteuerung

Details

Veröffentlichungs-Nr.

EP4170356

Aktenzeichen

EP22200494

Anmeldetag

10. Oktober 2022

Veröffentlichung

17. September 2025

Erteilung

17. September 2025

Rechtsraum

EP

IPC

G01P21/00G01P15/125G01P15/18G01P15/08

Abstract

A microelectromechanical system (MEMS) accelerometer sensor (12x, 12y, 12z) has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal having a variably controlled excitation voltage and a fixed pulse width is applied to the sensing capacitor. The leading and trailing edges of the test signal are aligned to coincide with reset phases of a sensing circuit (32-36) coupled to the sensing capacitor. The variably controlled excitation voltage of the test signal is configured to cause an electrostatic force which produces a desired physical displacement of the mobile mass. During a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the actual physical displacement of the mobile mass is sensed for comparison to the desired physical displacement.

Anmelder

Firmen

STMicroelectronics S.r.l.
STMicroelectronics Inc.

Land

🇮🇹 Italien

Fachgebiete