Verfahren zur Korrektur von Out-Of-Band-Lecks und Metrologie-Apparat

Details

Veröffentlichungs-Nr.

EP4170429

Aktenzeichen

EP21203532

Anmeldetag

19. Oktober 2021

Veröffentlichung

26. April 2023

Rechtsraum

EP

IPC

G03F7/20G01N21/956

Abstract

Disclosed is method of correcting a metrology image for an out-of-band leakage signal contribution resultant from leakage of measurement radiation at suppressed wavelengths. The method comprises: obtaining at least one correction image, said correction image obtained using measurement radiation with all wavelengths or wavelength bands maximally suppressed by a radiation modulation device; obtaining a metrology image using measurement radiation comprising modulated broadband radiation, modulated by the radiation modulation device to obtain a configured spectrum; and using the at least one correction image to correct the metrology image.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete