Detektoranordnung, Vorrichtung für Geladene Teilchen, Gerät und Verfahren

Details

Veröffentlichungs-Nr.

EP4170695

Aktenzeichen

EP21203434

Anmeldetag

19. Oktober 2021

Veröffentlichung

26. April 2023

Rechtsraum

EP

IPC

H01J37/244

Abstract

The present application discloses detector assembly for a charged particle assessment apparatus, the detector assembly comprising a plurality of electrode elements, each electrode element having a major surface configured to be exposed to signal particles emitted from a sample, wherein between adjacent electrode elements is a recess that is recessed relative to the major surfaces of the electrode elements, and wherein at least one of the electrode elements is a detection element configured to detect signal particles and the recess extends laterally behind the detection element. Charged particle assessment devices and apparatus, and corresponding methods are also provided.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete