Vakuumpumpenvorrichtung

Details

Veröffentlichungs-Nr.

EP4177465

Aktenzeichen

EP22205764

Anmeldetag

7. November 2022

Veröffentlichung

22. Januar 2025

Erteilung

22. Januar 2025

Rechtsraum

EP

IPC

F04B37/14F04B53/08F04C25/02F04C29/04

Abstract

A vacuum pump apparatus capable of maintaining an inside of a rotor chamber (1) of a pump casing (2) at a high temperature and capable of being easily attached and removed a heater (70A,70B) is disclosed. The vacuum pump apparatus includes: a pump casing (2); a pump rotor (5) arranged in the rotor chamber; a rotation shaft (7) to which the pump rotor is fixed; an electric motor (8) coupled to the rotation shaft; a side cover (10a, 10B) forming an end surface of the rotor chamber; a housing structure located outwardly of the side cover in an axial direction of the rotation shaft; and a cartridge heater (70A, 70B) disposed in the side cover and removably attached to the side cover or the pump casing. The cartridge heater has a heater and a heater casing (71) covering at least a part of the heater, and the heater casing has a slit ( 72A) extending from one end to other end thereof.

Anmelder

Firmen

EBARA CORPORATION
Ebara Corporation

Land

🇯🇵 Japan

Fachgebiete