Vorrichtung mit Geladenem Teilchenstrahl

Details

Veröffentlichungs-Nr.

EP4235732

Aktenzeichen

EP23156389

Anmeldetag

13. Februar 2023

Veröffentlichung

20. März 2024

Erteilung

20. März 2024

Rechtsraum

EP

IPC

H01J37/244

Abstract

Light which is radiant energy is emitted from a sample (20) which is heated, and is detected by a backscattered electron detector (36). A detection signal from the backscattered electron detector (36) includes a radiant component. A radiant component removal section (46) extracts the radiant component from the detection signal using a filter, and then removes the radiant component from the detection signal. An optical detector which detects the radiant component may be provided. A divided detector may be provided as the backscattered electron detector (36).

Anmelder

Firmen

JEOL Ltd.
Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete