Flüssigkeitszufuhrsystem, Verarbeitungsvorrichtung und Programm

Details

Veröffentlichungs-Nr.

EP4239435

Aktenzeichen

EP23159392

Anmeldetag

1. März 2023

Veröffentlichung

28. Mai 2025

Erteilung

28. Mai 2025

Rechtsraum

EP

IPC

G05D7/06

Abstract

There is provided a technique that includes: a flow rate controller (100) configured to control a flow rate of fluid flowing in a pipe; an adjuster (72, 54, 76, 95) configured to supply an adjustment gas to at least a downstream side of the flow rate controller (100); and a controller (41) configured to be capable of suppressing a phase change of the fluid, which is caused by a temperature drop due to adiabatic expansion, by supplying the adjustment gas from the adjuster (72, 54, 76, 95) according to a difference between an internal pressure of the flow rate controller (100) and a pressure on a downstream side of the flow rate controller (100).

Anmelder

Firma

Kokusai Electric Corp.

Land

🇯🇵 Japan

Fachgebiete