Verfahren zur Herstellung von Lichtemittierenden Elementen mit Resonantem Hohlraum und Optische Vorrichtung damit

Details

Veröffentlichungs-Nr.

EP4250378

Aktenzeichen

EP22164120

Anmeldetag

24. März 2022

Veröffentlichung

24. Dezember 2025

Erteilung

24. Dezember 2025

Rechtsraum

EP

IPC

H10H29/80H10H29/01H10H20/01H10H29/14H10H29/49// H10H29/24H10H29/39H10H29/85H01L25/16

Abstract

A method (100) is provided for forming resonant cavity light emitting elements. The method comprises a step (101) of forming a first structure comprising a first substrate, a stop layer, a light emitting epitaxial structure, a conductive oxide layer, and a second substrate dielectrically bonded to the conductive oxide layer. The method further comprises a step (102) of etching from the first substrate up to the stop layer to etch away the first substrate. Additionally, the method comprises a step (103) of forming a plurality of light emitting mesa modules, each having a metal layer deposited on the stop layer. Furthermore, the method comprises a step (104) of hybrid bonding the previously etched first structure to a carrier substrate to form a second structure. Furthermore, the method comprises a step (105) of etching from the second substrate up to the conductive oxide layer. Moreover, the method comprises a step (106) of depositing a distributed Bragg reflector on top of the conductive oxide layer, thereby forming the resonant cavity light emitting elements.

Anmelder

Firma

Micledi Microdisplays BV

Land

🇧🇪 Belgien

Fachgebiete