Kompakter Mikroelektromechanischer Drehratensensor

Details

Veröffentlichungs-Nr.

EP4253909

Aktenzeichen

EP23163094

Anmeldetag

21. März 2023

Veröffentlichung

27. Dezember 2023

Rechtsraum

EP

IPC

G01C19/574

Abstract

A MEMS angular rate sensor is presented with two pairs of suspended masses that are micromachined on a semiconductor layer. A first pair includes two masses opposite to and in mirror image of each other. The first pair of masses has driving structures to generate a mechanical oscillation in a linear direction. A second pair of masses includes two masses opposite to and in mirror image of each other. The second pair of masses is coupled to the first pair of driving masses with coupling elements. The two pairs of masses are coupled to a central bridge. The central bridge has a differential configuration to reject any external disturbances. Each of the masses of the two pairs of masses includes different portions to detect different linear and angular movements.

Anmelder

Firma

STMicroelectronics S.r.l.

Land

🇮🇹 Italien

Fachgebiete